The cleanroom classification standards fs 209e and iso 14644 1 require specific particle count measurements and calculations to classify the cleanliness level of a cleanroom or clean area. Concentrations of ultrafine particles particles smaller than 0 1 µm will be addressed in a separate standard to specify air cleanliness by nano scale particles. For cleanrooms and clean zones shown in iso 14644 1 2015 cleanroom limits for airborne particulate contamination clean room and clean air device classification in relation to gmp 2008.
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